The FFU Fan Filter Unit with Chemical Filtration is an advanced cleanroom air recirculation system integrating particulate and molecular contamination control. This self-contained module combines:HEPA/ULPA filtration (ISO Class 3-5 compliance),Activated carbon/VOC chemical filtration,EC motor technology for precise airflow control.
1. Integrated Contamination Control
Removes both particles (≥0.3μm) and chemicals in one unit
Target-specific media options:
KMnO₄-impregnated carbon: Formaldehyde/ethylene removal
Acid-gas carbon: SO₂/HCl scrubbing for semiconductor fabs
2. Energy Smart Operation
EC motors reduce power consumption by 40% vs. AC FFUs
Variable speed control (0.3-0.5 m/s) with auto-adjustment based on sensor data
3. Plug-and-Play Deployment
Standard 575x575mm/1175x575mm ceiling grid compatibility
Tool-free filter replacement - Chemical cartridges swap in <3 mins
4. Regulatory Ready
Pre-validated for:EU GMP Annex 1 (Grade A/B zones)
SEMI F21 (AMC control in chip fabs)
ISO 14644-1 Class 3-5
Category | Specifications |
---|---|
Particulate Filtration | H13 (99.95%@0.3μm) / U15 (99.9995%@0.12μm) |
Chemical Filtration | 10-50kg carbon per unit, 95% VOC removal |
Airflow | 500-1,500 m³/h (adjustable) |
Noise Level | ≤55 dB(A) @ 1m |
Power Consumption | 80-200W (depending on configuration) |
Control Interface | Touch panel / Modbus RTU / IoT wireless |
Materials | 304SS frame, fluorosilicone gaskets |
Operating Temp. | 15-30°C (59-86°F) |
1. Pharmaceutical
Sterile filling lines: Controls VOCs from stopper sterilization
API production: Captures solvent fumes (ACN, DMF)
2. Electronics
Lithography areas: Filters IPA/amine vapors
OLED manufacturing: AMC control for thin-film deposition
3. Healthcare
Gene therapy labs: Contains viral vector aerosols
Isolation rooms: Removes anesthetic gases (sevoflurane)
4. Food Tech
Flavor encapsulation: VOC control during spray drying
Packaging rooms: Ethylene scrubbing for fresh produce
Q1: How often to replace chemical media?
A: 6-18 months depending on:VOC load (monitor via onboard sensors),Carbon type (standard coconut: 12mo, KMnO₄: 6mo).
Q2: Can it handle corrosive gases like HF?
A: Yes - Specify:
316L stainless steel housing
Alumina-impregnated media for acid gases
Q3: Difference between wall-mounted vs ceiling FFU?
Type | Airflow Pattern | Best For |
---|---|---|
Ceiling | Unidirectional downflow | ISO 5 cleanrooms |
Wall | Horizontal laminar flow | Equipment shielding |